Nucleation theory and the early stages of thin film growth
نویسندگان
چکیده
A review is given of nucleation and growth models as applied to the earliest stages of thin film growth. Rate equations, kinetic Monte Carlo, and level set simulations are described in some detail, with discussion of remaining uncertainties, in particular the functional form of the so-called capture numbers in rate equations. Recent examples are given of sub-monolayer nucleation at surface defects, attachment-limited capture, and Ostwald ripening. The experimental literature is cited, and experiment–theory comparisons are made where possible. Emphasis is given to fast computational models that can span a large range of length and time scales, which might be further developed in the direction of on-line process control. © 2003 American Vacuum Society. @DOI: 10.1116/1.1600454#
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